EC Sense

ES1-SiH4-50 Silane Gas Sensor

Model: ES1-SiH4-50-01

Silane Amperometric, 3-electrode

ES1 compact package, 0 – 50 ppm, Silane (SiH4) detection for portable devices and space-constrained modules

ES1-SiH4-50 Silane Gas Sensor

The EC Sense ES1-SiH4-50 is a compact electrochemical gas sensor for silane detection, with a 0 – 50 ppm range and 0.01 ppm resolution. Its PPO housing and ultra-compact SMD package at under 0.7 g suit portable detectors and space-constrained module integration in semiconductor and electronics-factory silane leak monitoring. Because silane autoignites at about 21 ℃ with a flammable range of 1.37% – 96% vol, the engineering approach is to treat it as flammable first and confirm with a ppm-level sensor second.

Key Features

  • Direct linearity
  • Fast response time
  • Non-poisoning
  • No electrolyte leakage
  • No zero drift
  • Long lifetime
  • No power consumption (nA-level signal)
  • Weight < 0.7 g
  • RoHS compliant

Typical Applications

Semiconductor IndustryElectronics FactorySilane leak detection (PECVD, silane furnace areas)Industrial Safety

Calibration & Cross-Sensitivity

Calibrated with Silane (SiH4) standard gas. Cross-sensitivity to other gases may exist — see the cross-sensitivity table in the datasheet. Every sensor is tested under standard conditions before shipment; refer to the datasheet for the calibration gas and tolerance data.